Zeiss offers backscatter spectroscopy for helium-ion scope
-- Test & Measurement World, 3/24/2009 9:00:00 AM
A new detector from Carl Zeiss for its Orion Plus helium-ion microscope adds structural and compositional analysis capabilities to the scope’s subnanometer resolution imaging. The Spectra detector extends the analytical capability currently available on high-resolution imaging instruments and provides information that is both unique and complementary to that which is available from existing technologies.
At the center of the Spectra analysis package is a solid-state detector optimized for the detection of backscattered helium. This materials characterization technique, which is similar to other ion scattering techniques, uses the properties of backscattered helium—specifically energy and angle—to determine the mass of the scattering nuclei within the sample.
The detector package also includes data processing and data communication electronics, a data acquisition PC, and all the mechanical, electrical, and software interfaces required to allow seamless integration with the Orion Plus helium-ion microscope. Users of the microscope are in full control of the workflow, enabling rapid switching between imaging and analysis tasks.
Carl Zeiss, www.smt.zeiss.com/orion.
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