RF parametric test option debuts
Staff -- Test & Measurement World, 4/1/2005 2:00:00 AM
Keithley has introduced its third-generation on-wafer RF measurement capability for semiconductor parametric production process control. New to Keithley's third-generation RF Option is the ability to offer continuous, automatic, real-time monitoring of measurement quality. The RF Option supports parametric process control for 200-mm and 300-mm wafer fabs.
The RF Option, combined with the Model S680 SimulTest option and appropriately designed test structures and probe cards, can make simultaneous DC and RF measurements in parallel within the same probe touchdown. RF parameters can be extracted and de-embedded in real time from measured S-parameters without the need for post processing.
When combined with the Model S680 parametric test system, the RF Option permits direct-dock capability for making measurements at 40 GHz, making unnecessary a manual probe card change by an RF specialist followed by manual recalibration. Keithley's third-generation RF Option measurement capability is available for both new Model S680 and Model S470 systems and is also available as a field-retrofit to existing Model S600 and Model S400 Series units installed during the past 15 years.
Retrofit price: $150,000. Keithley Instruments,www.keithley.com.
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