Measurement system includes Windows 2000
Staff -- Test & Measurement World, 2/1/2004
The MicroLine 400 critical measurement system from Micro-Metric now comes with Windows 2000 capability. The system automatically measures linewidth, overlay, and other critical parameters from 0.5 mm to 400 mm on wafers and photomasks. It features a vibration isolation table and an autofocus function, giving measurement repeatability to 4 nm or better with a 100X objective lens. A motorized x-y stage provides positional accuracy to less than 25 mm. Micro-Metric, San Jose, CA. 800-490-3333; www.micro-metric.com .
