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FED measurements

Staff -- Test & Measurement World, 5/1/2004

The automated Innova provides noncontact measurement of micromachined holes for FED gate plates with nanometer precision. A CCD camera transfers images to computer memory and to a CRT display. The system locates the hole's circle by analyzing the pixels contained within the measurement window and building a radial intensity profile. It performs various calculations to identify the circle edge, and then a best-fit circle formula calculates the diameter and the center of the circle represented by data points. Micro-Metric, San Jose, CA. 800-490-3333; www.micro-metric.com .

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