Overlay measurement software
Staff -- Test & Measurement World, 8/1/2004
Micro-Metric has announced new MMWin software for overlay measurement. Using an image-analysis algorithm that employs a profile-symmetry technique, the software displays a real-time video image of the features being measured and provides instant performance feedback according to stored parameters. The company claims the system achieves repeatability of less than 5 nm (3 sigma). Micro-Metric, San Diego, CA. www.micro-metric.com.
