Laser sensor
Staff -- Test & Measurement World, 9/1/2004
The improved Laser Nano Sensor from LMI Technologies features a miniature sensor head and an extremely small spot size for use in applications ranging from micro-positioning to thickness and roughness measurements. With a resolution as fine as 0.7 nm at speeds up to 200 kHz, the sensor has a fast response rate and a spot size ranging from 1 to 6 microns. This spot size allows for a displacement measurement within a few nanometers when quantifying surface roughness of highly reflective surfaces such as glass or stainless steel.
The Laser Nano Sensor can be used for positioning polished components such as silicon wafers or circuitry, for vibration measurements, and for measuring differential thickness. Available in four models, the sensor has a measuring range of from 0.00016 in. to 0.005 in. (4.0 to 130 μM) and operating distances ranging from 0.09 to 1.0 in. (2.3 mm to 26 mm). Accuracy ranges from 0.022 nm to 0.75 nm. LMI Technologies, Southfield, MI. www.lmint.com.
