Nikon ships 150 inspection systems
Staff -- Test & Measurement World, 2/1/2005
Nikon's Semiconductor Inspection Technologies Group (SITECH) reports that it has shipped 150 optical inspection tools used for 300-mm wafers to several US-based semiconductor manufacturers. The tools—the OST-3200, OST-3100, and OST-7—allow customers to inspect wafers for both macro and micro defects. www.nikonusa.com.
