Semiconductor metrology
Staff -- Test & Measurement World, 2/1/2005
The MicroXR X-ray fluorescence platform combines both microbeam x-ray collimation technology and conventional energy dispersive XRF spectroscopy for measuring the thickness and composition of up to five layers of deposited metals simultaneously. Metal film thickness ranges from micron to angstrom levels. The MicroXR can also determine bulk alloy composition for up to 20 elements. The system is available in benchtop, console, and automated wafer-handling configurations for on-line and near-line measurements on wafers, optical devices, high-density chip-scale packaging, and substrates.
Thermo Electron, Boston, MA. www.thermo.com.
