Micro laser interferometer
Staff -- Test & Measurement World, 2/1/2005
Combining a Michelson interferometer with a 650-nm semiconductor laser in a single compact package, the DS-80 micro laser interferometer provides continuous and accurate detection of tiny movements in a wide variety of products and applications. The non-contact displacement sensor has a resolution of 0.08 nm with a maximum high-speed response of 500 kHz. Measuring range is ±–50 µm. Two versions of the DS-80 sensor are available offering working distances of 10 mm and 2.5 mm, as well as a choice of sampling speeds.
Canon USA, Lake Success, NY; www.canon.com/optoelectro.
