On-wafer probing for semiconductor R&D
Staff -- Test & Measurement World, 6/1/2005
Cascade Microtech developed its PureLine technology to provide measurement capability for 200-mm and 300-mm on-wafer probing systems aimed at R&D applications. PureLine systems are designed to accommodate operating voltages that will fall from 0.9 V to 0.7 V by 2010, leaving less head room to tolerate spurious signals. They can accommodate lower applied stress voltages in time-dependent dielectric-breakdown (TDDB) measurements and smaller voltage steps for generating IV curves.
In addition to TDDB, PureLine systems support MOS DC characterization (which requires accurate threshold voltage measurements), 1/f flicker-noise test (which requires low background radiated noise and which is important for communications devices), and MOS CV capacitance measurements (at low AC stimulus levels). They employ patented technology to provide high immunity from conducted, radiated, and internal noise
Base price: $75,000 for a manual system configured with typical options. Cascade Microtech, www.cascademicrotech.com.
