Thin-film research tool
Staff -- Test & Measurement World, 9/1/2005
The fully automated Theta 300XT manages the transition of new gate dielectrics and other thin structures from development to production. Its parallel angle resolved X-ray photoelectron spectroscopy technique produces accurate and repeatable measurement of thickness and composition in ultra-thin structures. The Theta 300XT performs 200-mm and 300-mm wafer mapping of thickness, elemental and chemical uniformity measurement, and non-destructive depth profiling to determine interface chemistry. Thermo Electron, www.thermo.com.
