Semicon West: Micromanipulator highlights motorized probing station
-- Test & Measurement World, 7/25/2007 11:34:00 AM
The Micromanipulator Co. at Semicon West highlighted its new P300J motorized, joystick-controlled probing station.
Motorized drives provide interactive manual control—by means of a joystick or Micromanipulator’s MicroTouch controls—of the probe station’s stage, theta angle, platen, and microscope. In addition, the P300J features a dynamic high/low speed range, which provides the ability for high resolution, precise positioning as well as quick scans across a 300-mm wafer.
Micromanipulator’s RMC-7 motorized control system drives the P300J. It features an x-y-theta control mode for wafer alignment, a z lockout setting to avoid accidental platen z movements during x-y moves, and a full x-y-z-theta lock out mode to avoid movement due to inadvertent bumps during testing.
The 9020 can probe 200- to 300-mm semiconductor wafers as well as flat-panel substrates for failure analysis, wafer level reliability, and device and process characterization and modeling. It supports DC passive and active probes, RF and microwave probes and manipulators, standard and multi-site probe cards, and manipulator-mounted multisite cards (like Celadon’s Versa-Tile cards) mounted on Micromanipulator’s WAVE (WLR and Microwave) manipulator system.
“The P300J represents the next generation of our 300 mm manual/motorized probe stations,” said Mike Jackson, director of sales and marketing. “The station features a completely new controller and also major redesigns of the system hardware to enhance stability and reliability.”
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