JEOL completes microprobe installation at NIST
-- Test & Measurement World, 8/9/2007 6:01:00 AM
JEOL USA, a supplier of electron microscopes and scientific instruments for nanotechnology, has announced that it has completed installation and acceptance of its first thermal field emission electron microprobe in the US. The microprobe was installed at NIST in Gaithersburg, MD.
A fully-automated, high-throughput electron probe microanalyzer (EPMA), the JEOL JXA-8500F offers an analytical ability that surpasses that of scanning electron microscopes (SEM), the company reports. The ability to simultaneously utilize an energy-dispersive x-ray spectrometer (EDS) and up to five wavelength-dispersive x-ray spectrometers (WDS) increases speed for elemental analysis of nanometric sample areas. All but a few of the elements on the periodic table can be analyzed. As a result, the microprobe is suitable for use in materials, geological, and petrological fields.
The JXA-8500F uses a Schottky-type field-emission gun. The probe diameter is 1/10th the size of conventional probes.
“This new FE gun allows us to analyze extremely small features by operating at low kV and high beam currents,” said Charles Nielsen, VP of JEOL USA. “The analytical ability of this instrument makes it possible to measure features and map them with a resolution approaching one hundred nanometers.”
The analytical ability of the microprobe comes at a higher price than the SEM, Nielsen added, noting that the price is about 20% higher than conventional EPMA.
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