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3-D metrology system boasts high precision

Staff -- Test & Measurement World, 12/1/2007

Designed for researchers working between the limits of conventional optical microscopes and scanning electron microscopes, the LEXT OLS3100 confocal laser scanning microscope from Olympus permits high-resolution 3-D observation and measurement in real time. The LEXT provides a horizontal resolution of 0.12 µm and a magnification range from 120X to 14,400X to meet a diverse range of needs in fine surface-profile measurement.

A 3-D image navigation tool guides users through each step of microscopic observation, and a 3-D image capture is performed with just a single click of a button. The LEXT OLS3100 lets you measure step height, line width, and the distance between two points in a 3-D image. It also presents a variety of standard and novel 3-D image presentation patterns, including surface texture, real color, and wired frame. What’s more, time-consuming tasks like setting the upper and lower focal limits are completely automatic.

The LEXT microscope integrates an apochromatic objective lens specifically designed for confocal laser scanning microscopy, with a near-UV (408-nm) laser light.

Olympus, www.olympus-europa.com.

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