FEI introduces extreme high-resolution scanning electron microscopes
-- Test & Measurement World, 7/18/2008 11:36:00 AM
With its release of the Magellan Family, FEI Company introduced a new class of instruments called extreme high-resolution scanning electron microscopes (XHR SEMs). The Magellan XHR SEM allows scientists and engineers to see 3-D surface images at many different angles and at resolutions below one nanometer. The Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below.
“Magellan is the only family of instruments to make subnanometer resolution accessible in a practical sense to nonexperts and without restriction on samples—constraints that have previously limited the utility and acceptance of other systems,” said Dr. Rob Fastenau, FEI’s executive VP, marketing and technology.
Subnanometer resolution has value in scientific research, industrial R&D, process development, monitoring, and control applications in advanced semiconductor manufacturing. The Magellan Family extends this capability to applications that were previously impractical with conventional SEM, transmission electron microscope (TEM) or focused ion beam (FIB) systems.
The ability to provide subnanometer resolution over a broad range of beam energies, from less than one kV to 30 kV, allows semiconductor manufacturers to see critical detail on complex 3-D structures in 32-nm nodes and below, with clarity and contrast. Researchers in materials science will have the ability to generate high-resolution, surface-sensitive images of carbon nanotubes, nanowires, and catalysts without the image distortions caused by electrical charging from higher energy electron beams. Across the board, the Magellan Family extends the range of nanoscale imaging and analysis, with the speed and ease-of-use of traditional SEMs.
The Magellan Family’s performance derives from the integration of new electron optical elements, proprietary electron gun technology, a highly accurate five-axis piezo-ceramic stage and high stability platform with fully configurable analytical chamber. The stage readily accommodates large samples or multiple smaller samples, while providing accurate navigation and stability.
The Magellan Family comes in two models: The Magellan 400 is optimized for scientific research, while the Magellan 400L is optimized for semiconductor labs. The semiconductor lab model comes with a load-lock feature that speeds up sample throughput, and includes a retractable solid state backscatter electron detector (SSBSED) and S2 compliance kit. Both models have an optional, full environmental enclosure to isolate the instrument from thermal and acoustic interferences, ensuring peak performance while relaxing site requirements and facility preparation costs. The Magellan Family is available for purchase now, with initial shipments planned to begin in September 2008.
FEI Company, www.fei.com.
