SEM minimizes beam charge
-- Test & Measurement World, 9/1/2008
JEOL USA’s JSM-7600F thermal field-emission-gun scanning-electron microscope (SEM) integrates a semi-in-lens objective lens with an in-lens thermal electron gun to provide sharp imaging of nonconductive samples that charge, such as photomasks and ceramics. The JSM-7600F minimizes beam charge on heat-sensitive samples, like low-K dielectrics, and offers improved stability for unattended data acquisition in metrology, particle analysis, defect review, and x-ray mapping applications.
The in-lens thermal electron gun, combined with an aperture angle optimizing lens, achieves a probe current of 200 nA or higher at an accelerating voltage of 15 kV. The JSM-7600F has a guaranteed resolution of 1.0 nm at a high accelerating voltage of 30 kV and a working distance 4.5 mm; a guaranteed resolution of 1.5 nm at a low accelerating voltage of 1 kV and a working distance of 1.5 mm; and a guaranteed resolution of 3.0 nm at a high probe current of 5 nA, an accelerating voltage of 15 kV, and a working distance of 8 mm.
JEOL USA, www.jeolusa.com.
